2D CMUT array based ultrasonic micromanipulation platform

Abstract

In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations that a particle can be trapped and manipulated both in lateral and axial directions inside the fluid channel by activating CMUT elements; And calculated acoustic radiation force acting on a polystyrene particle of 10-µm radius. We fabricated a 32×32-element row/column-addressed 2D CMUT array on a glass substrate using anodic bonding technology. This approach provides a cost effective and easily implementable solution to micro-particle trapping and handling.